Photolithography Services

Our team of PhD engineers has decades of experience in photolithography, offering services for fabrication of custom surfaces.

Our capabilities include:

• Expertise with epoxy resists (e.g. SU-8) and metal lift-off resists
• i-line (365-nm wavelength) exposure source light
• Processing for circular and square wafers up to 4″
• Feature resolution down to 1 µm
• Plasma or wet (HF, piranha, KOH) etching
• Ultrasonic cleaning and resist development

Previous projects include:

• Patterned gold electrodes
• Optical filters
• Microwells and micropillar arrays
• Topographically patterned substrates for cell culture

Contact us at 608-237-1270 or via email to discuss your project with one of our in-house experts on photolithography services.