Using Photolithography for Surface Patterning
What is Photolithography? Photolithography, sometimes known as optical lithography or UV lithography is a process that is used in microfabrication for surface patterning parts of a thin film or the bulk of a substrate. Photolithography uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical photoresist or simply resist on the substrate. A series of chemical treatments are then used to engrave the exposed surface to create a pattern in the material. Alternatively, it may enable the deposition of new material in the desired pattern on the material beneath the photoresist. Photolithography has some similarities to photography in the sense that the etching is formed by exposure to light either directly or indirectly using a projected image. Photolithography is comparable to the high precision version of the technique employed to create printed circuit boards. The photoresist
